Simulation approach of atomic layer deposition in large 3D structures

Schwille, Matthias C.; Barth, Jonas; Bartha, Johann W.; Oettel, Martin; Schössler, Timo; Schön, Florian

dc.contributor.author	Oettel, Martin
dc.date.accessioned	2018-01-25T11:27:52Z
dc.date.available	2018-01-25T11:27:52Z
dc.date.issued	2017
dc.identifier.issn	1361-651X
dc.identifier.uri	http://hdl.handle.net/10900/79975
dc.language.iso	en	de_DE
dc.publisher	Bristol : IOP Publishing	de_DE
dc.relation.uri	http://dx.doi.org/10.1088/1361-651X/aa5f9d	de_DE
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject.ddc	530	de_DE
dc.subject.ddc	600	de_DE
dc.title	Simulation approach of atomic layer deposition in large 3D structures	de_DE
dc.type	Article	de_DE
utue.quellen.id	20170815222223_01129
utue.personen.roh	Schwille, Matthias C.
utue.personen.roh	Barth, Jonas
utue.personen.roh	Bartha, Johann W.
utue.personen.roh	Oettel, Martin
utue.personen.roh	Schössler, Timo
utue.personen.roh	Schön, Florian
dcterms.isPartOf.ZSTitelID	Modelling and Simulation in Materials Science and Engineering	de_DE
dcterms.isPartOf.ZS-Issue	3	de_DE
dcterms.isPartOf.ZS-Volume	25	de_DE
utue.fakultaet	04 Medizinische Fakultät	de_DE