Simulation approach of atomic layer deposition in large 3D structures

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Simulation approach of atomic layer deposition in large 3D structures

Author: Schwille, Matthias C.; Barth, Jonas; Bartha, Johann W.; Oettel, Martin; Schössler, Timo; Schön, Florian
Tübinger Autor(en):
Oettel, Martin
Published in: Modelling and Simulation in Materials Science and Engineering (2017), Bd. 25, H. 3
Verlagsangabe: Bristol : IOP Publishing
Language: English
Full text: http://dx.doi.org/10.1088/1361-651X/aa5f9d
ISSN: 1361-651X
DDC Classifikation: 530 - Physics
600 - Technology
Dokumentart: Artikel
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