High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments

dc.contributor.author	Banghard, Michael
dc.contributor.author	Hartmann, Romy
dc.contributor.author	Silmy, Kamel
dc.contributor.author	Nisch, Wilfried
dc.contributor.author	Metzen, René von
dc.contributor.author	Stett, Alfred
dc.contributor.author	Bucher, Volker
dc.date.accessioned	2017-03-10T14:40:13Z
dc.date.available	2017-03-10T14:40:13Z
dc.date.issued	2016
dc.identifier.issn	1873-5568
dc.identifier.uri	http://hdl.handle.net/10900/74800
dc.language.iso	en	de_DE
dc.publisher	Elsevier Science Bv	de_DE
dc.relation.uri	http://dx.doi.org/10.1016/j.mee.2016.03.057	de_DE
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject.ddc	530	de_DE
dc.subject.ddc	600	de_DE
dc.title	High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments	de_DE
dc.type	Article	de_DE
utue.quellen.id	20160915142648_01336
utue.publikation.seiten	126-131	de_DE
utue.personen.roh	Banghard, Michael
utue.personen.roh	Hartmann, Romy
utue.personen.roh	Silmy, Kamel
utue.personen.roh	Nisch, Wilfried
utue.personen.roh	von Metzen, Rene
utue.personen.roh	Stett, Alfred
utue.personen.roh	Bucher, Volker
dcterms.isPartOf.ZSTitelID	Microelectronic Engineering	de_DE
dcterms.isPartOf.ZS-Issue	SI	de_DE
dcterms.isPartOf.ZS-Volume	153	de_DE
utue.fakultaet	04 Medizinische Fakultät	de_DE
utue.fakultaet	07 Mathematisch-Naturwissenschaftliche Fakultät	de_DE