High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments
Author:
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Banghard, Michael; Hartmann, Romy; Silmy, Kamel; Nisch, Wilfried; von Metzen, Rene; Stett, Alfred; Bucher, Volker
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Tübinger Autor(en):
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Published in:
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Microelectronic Engineering
(2016), Bd.
153,
H.
SI,
S.
126-131
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Verlagsangabe:
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Elsevier Science Bv
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Language:
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English
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Full text:
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http://dx.doi.org/10.1016/j.mee.2016.03.057
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ISSN:
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1873-5568
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DDC Classifikation:
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530 - Physics 600 - Technology
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Dokumentart:
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Article
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Show full item record
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