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| Author: | Banghard, Michael; Hartmann, Romy; Silmy, Kamel; Nisch, Wilfried; von Metzen, Rene; Stett, Alfred; Bucher, Volker | |
| Tübinger Autor(en): |
|
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| Published in: |
Microelectronic Engineering
(2016), Bd.
153,
H.
SI,
S.
126-131 |
|
| Verlagsangabe: | Elsevier Science Bv | |
| Language: | English | |
| Full text: | http://dx.doi.org/10.1016/j.mee.2016.03.057 | |
| ISSN: | 1873-5568 | |
| DDC Classifikation: |
530 - Physics 600 - Technology |
|
| Dokumentart: | Article | |
| Show full item record |