High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments

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High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments

Author: Banghard, Michael; Hartmann, Romy; Silmy, Kamel; Nisch, Wilfried; von Metzen, Rene; Stett, Alfred; Bucher, Volker
Tübinger Autor(en):
Banghard, Michael
Hartmann, Romy
Silmy, Kamel
Nisch, Wilfried
von Metzen, Rene
Stett, Alfred
Bucher, Volker
Published in: Microelectronic Engineering (2016), Bd. 153, H. SI, S. 126-131
Verlagsangabe: Elsevier Science Bv
Language: English
Full text: http://dx.doi.org/10.1016/j.mee.2016.03.057
ISSN: 1873-5568
DDC Classifikation: 530 - Physics
600 - Technology
Dokumentart: Artikel
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