Combinatorial sputtering in planetary type systems for alloy libraries with perpendicular gradients of layer thickness and composition realised by a timing approach

dc.contributor.author	Kleiner, Reinhold
dc.contributor.author	Kölle, Dieter
dc.contributor.author	Goldobin, Edward
dc.contributor.author	Sickinger, Hanna Sabine
dc.date.accessioned	2014-09-11T10:15:16Z
dc.date.available	2014-09-11T10:15:16Z
dc.date.issued	2014
dc.identifier.issn	0947-8396
dc.identifier.uri	http://hdl.handle.net/10900/56173
dc.language.iso	en	de_DE
dc.publisher	Springer	de_DE
dc.relation.uri	http://dx.doi.org/10.1007/s00339-013-8100-x	de_DE
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject.ddc	530	de_DE
dc.subject.ddc	600	de_DE
dc.title	Combinatorial sputtering in planetary type systems for alloy libraries with perpendicular gradients of layer thickness and composition realised by a timing approach	de_DE
dc.type	Article	de_DE
utue.quellen.id	20140813180100_00078	de_DE
utue.publikation.seiten	229-232	de_DE
utue.personen.roh	Ruppelt, N.
utue.personen.roh	Vavra, O.
utue.personen.roh	Sickinger, H.
utue.personen.roh	Goldobin, E.
utue.personen.roh	Koelle, D.
utue.personen.roh	Kleiner, R.
utue.personen.roh	Kohlstedt, H.
dcterms.isPartOf.ZSTitelID	Applied Physics A - Materials Science & Processing	de_DE
dcterms.isPartOf.ZS-Issue	1	de_DE
dcterms.isPartOf.ZS-Volume	116	de_DE
utue.fakultaet	07 Mathematisch-Naturwissenschaftliche Fakultät	de_DE