Real-time automatic inspection of macro defects in in-line TFT fabrication process

dc.contributor.author	Son, Hyoung Il
dc.date.accessioned	2014-04-16T14:31:48Z
dc.date.available	2014-04-16T14:31:48Z
dc.date.issued	2012
dc.identifier.issn	0954-4089
dc.identifier.uri	http://hdl.handle.net/10900/51594
dc.language.iso	en	de_DE
dc.publisher	Sage Publications Ltd	de_DE
dc.relation.uri	http://dx.doi.org/10.1177/0954408911413194	de_DE
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject.ddc	600	de_DE
dc.title	Real-time automatic inspection of macro defects in in-line TFT fabrication process	de_DE
dc.type	Article	de_DE
utue.quellen.id	20140226071329_02424	de_DE
utue.publikation.seiten	178-183	de_DE
utue.personen.roh	Son, H. I.
utue.personen.roh	Oh, M-H
dcterms.isPartOf.ZSTitelID	Proceedings of The Institution of Mechanical Engineers Part E - Journal of Process Mechanical Engineering	de_DE
dcterms.isPartOf.ZS-Issue	E2	de_DE
dcterms.isPartOf.ZS-Volume	226	de_DE