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| dc.contributor.author | Son, Hyoung Il | |
| dc.date.accessioned | 2014-04-16T14:31:48Z | |
| dc.date.available | 2014-04-16T14:31:48Z | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 0954-4089 | |
| dc.identifier.uri | http://hdl.handle.net/10900/51594 | |
| dc.language.iso | en | de_DE |
| dc.publisher | Sage Publications Ltd | de_DE |
| dc.relation.uri | http://dx.doi.org/10.1177/0954408911413194 | de_DE |
| dc.rights | info:eu-repo/semantics/closedAccess | |
| dc.subject.ddc | 600 | de_DE |
| dc.title | Real-time automatic inspection of macro defects in in-line TFT fabrication process | de_DE |
| dc.type | Article | de_DE |
| utue.quellen.id | 20140226071329_02424 | de_DE |
| utue.publikation.seiten | 178-183 | de_DE |
| utue.personen.roh | Son, H. I. | |
| utue.personen.roh | Oh, M-H | |
| dcterms.isPartOf.ZSTitelID | Proceedings of The Institution of Mechanical Engineers Part E - Journal of Process Mechanical Engineering | de_DE |
| dcterms.isPartOf.ZS-Issue | E2 | de_DE |
| dcterms.isPartOf.ZS-Volume | 226 | de_DE |
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