Real-time automatic inspection of macro defects in in-line TFT fabrication process

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dc.contributor.author Son, Hyoung Il
dc.date.accessioned 2014-04-16T14:31:48Z
dc.date.available 2014-04-16T14:31:48Z
dc.date.issued 2012
dc.identifier.issn 0954-4089
dc.identifier.uri http://hdl.handle.net/10900/51594
dc.language.iso en de_DE
dc.publisher Sage Publications Ltd de_DE
dc.relation.uri http://dx.doi.org/10.1177/0954408911413194 de_DE
dc.rights info:eu-repo/semantics/closedAccess
dc.subject.ddc 600 de_DE
dc.title Real-time automatic inspection of macro defects in in-line TFT fabrication process de_DE
dc.type Artikel de_DE
utue.quellen.id 20140226071329_02424 de_DE
utue.publikation.seiten 178-183 de_DE
utue.personen.roh Son, H. I.
utue.personen.roh Oh, M-H
dcterms.isPartOf.ZSTitelID Proceedings of The Institution of Mechanical Engineers Part E - Journal of Process Mechanical Engineering de_DE
dcterms.isPartOf.ZS-Issue E2 de_DE
dcterms.isPartOf.ZS-Volume 226 de_DE


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