Real-time automatic inspection of macro defects in in-line TFT fabrication process

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Real-time automatic inspection of macro defects in in-line TFT fabrication process

Author: Son, H. I.; Oh, M-H
Tübinger Autor(en):
Son, Hyoung Il
Published in: Proceedings of The Institution of Mechanical Engineers Part E - Journal of Process Mechanical Engineering (2012), Bd. 226, H. E2, S. 178-183
Verlagsangabe: Sage Publications Ltd
Language: English
Full text: http://dx.doi.org/10.1177/0954408911413194
ISSN: 0954-4089
DDC Classifikation: 600 - Technology
Dokumentart: Artikel
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