Real-time automatic inspection of macro defects in in-line TFT fabrication process

Author:

Son, H. I.; Oh, M-H

Tübinger Autor(en):

Published in:

Proceedings of The Institution of Mechanical Engineers Part E - Journal of Process Mechanical Engineering (2012), Bd. 226, H. E2, S. 178-183

Verlagsangabe:

Sage Publications Ltd

Language:

English

Full text:

ISSN:

0954-4089

DDC Classifikation:

600 - Technology

Dokumentart:

Article

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