Rapid Detection of Cleanliness on Direct Bonded Copper Substrate by Using UV Hyperspectral Imaging

dc.contributor.author	Knoblich, Mona
dc.contributor.author	Al Ktash, Mohammad
dc.contributor.author	Brecht, Marc
dc.date.accessioned	2024-12-03T09:50:53Z
dc.date.available	2024-12-03T09:50:53Z
dc.date.issued	2024
dc.identifier.issn	1424-8220
dc.identifier.uri	http://hdl.handle.net/10900/159254
dc.language.iso	en	de_DE
dc.publisher	Basel : Mdpi	de_DE
dc.relation.uri	http://dx.doi.org/10.3390/s24144680	de_DE
dc.subject.ddc	540	de_DE
dc.subject.ddc	600	de_DE
dc.title	Rapid Detection of Cleanliness on Direct Bonded Copper Substrate by Using UV Hyperspectral Imaging	de_DE
dc.type	Article	de_DE
utue.quellen.id	20241001000000_00915
utue.personen.roh	Knoblich, Mona
utue.personen.roh	Al Ktash, Mohammad
utue.personen.roh	Wackenhut, Frank
utue.personen.roh	Englert, Tim
utue.personen.roh	Stiedl, Jan
utue.personen.roh	Wittel, Hilmar
utue.personen.roh	Green, Simon
utue.personen.roh	Jacob, Timo
utue.personen.roh	Boldrini, Barbara
utue.personen.roh	Ostertag, Edwin
utue.personen.roh	Rebner, Karsten
utue.personen.roh	Brecht, Marc
dcterms.isPartOf.ZSTitelID	Sensors	de_DE
dcterms.isPartOf.ZS-Issue	14	de_DE
dcterms.isPartOf.ZS-Volume	24	de_DE
utue.fakultaet	07 Mathematisch-Naturwissenschaftliche Fakultät	de_DE