Rapid Detection of Cleanliness on Direct Bonded Copper Substrate by Using UV Hyperspectral Imaging

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Rapid Detection of Cleanliness on Direct Bonded Copper Substrate by Using UV Hyperspectral Imaging

Author: Knoblich, Mona; Al Ktash, Mohammad; Wackenhut, Frank; Englert, Tim; Stiedl, Jan; Wittel, Hilmar; Green, Simon; Jacob, Timo; Boldrini, Barbara; Ostertag, Edwin; Rebner, Karsten; Brecht, Marc
Tübinger Autor(en):
Knoblich, Mona
Al Ktash, Mohammad
Brecht, Marc
Published in: Sensors (2024), Bd. 24, H. 14
Verlagsangabe: Basel : Mdpi
Language: English
Full text: http://dx.doi.org/10.3390/s24144680
ISSN: 1424-8220
DDC Classifikation: 540 - Chemistry and allied sciences
600 - Technology
Dokumentart: Article
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