A comprehensive calibration of integrated magnetron sputtering and plasma enhanced chemical vapor deposition for rare-earth doped thin films

Author:

Khatami, Zahra; Wolz, Lukas; Wojcik, Jacek; Mascher, Peter

Tübinger Autor(en):

Published in:

Journal of Materials Research (2024), Bd. 39, H. 1, S. 150-164

Verlagsangabe:

Heidelberg : Springer Heidelberg

Language:

English

Full text:

ISSN:

0884-2914

DDC Classifikation:

600 - Technology

Dokumentart:

Article

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