Ion- and temperature-induced 3-dimensional nanoscale patterning in Ti1-xAlxN deposited by High Power Impulse Magnetron Sputtering

Warres, Clementine; Meyer, J. C.; Lutz, T.; Albrecht, P.; Engelhart, W.; Schroeppel, B.; Kuemmel, J.

dc.contributor.author	Warres, Clementine
dc.contributor.author	Meyer, Jannik C.
dc.contributor.author	Lutz, Tarek
dc.contributor.author	Albrecht, Philipp
dc.contributor.author	Schröppel, Birgit
dc.date.accessioned	2023-12-20T15:13:47Z
dc.date.available	2023-12-20T15:13:47Z
dc.date.issued	2023
dc.identifier.issn	0040-6090
dc.identifier.uri	http://hdl.handle.net/10900/148794
dc.language.iso	en	en
dc.publisher	Lausanne : Elsevier Science Sa	de_DE
dc.relation.uri	http://dx.doi.org/10.1016/j.tsf.2023.139977
dc.subject.ddc	600	de_DE
dc.subject.ddc	530	de_DE
dc.title	Ion- and temperature-induced 3-dimensional nanoscale patterning in Ti1-xAlxN deposited by High Power Impulse Magnetron Sputtering	de_DE
dc.type	Article	de_DE
utue.quellen.id	20230928000000_00037
utue.personen.roh	Warres, Clementine
utue.personen.roh	Meyer, J. C.
utue.personen.roh	Lutz, T.
utue.personen.roh	Albrecht, P.
utue.personen.roh	Engelhart, W.
utue.personen.roh	Schroeppel, B.
utue.personen.roh	Kuemmel, J.
dcterms.isPartOf.ZSTitelID	Thin Solid Films	de_DE
dcterms.isPartOf.ZS-Issue	Article 139977	de_DE
dcterms.isPartOf.ZS-Volume	781	de_DE
utue.fakultaet	04 Medizinische Fakultät
utue.fakultaet	07 Mathematisch-Naturwissenschaftliche Fakultät
utue.fakultaet	Sonstige