Ion- and temperature-induced 3-dimensional nanoscale patterning in Ti1-xAlxN deposited by High Power Impulse Magnetron Sputtering

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Ion- and temperature-induced 3-dimensional nanoscale patterning in Ti1-xAlxN deposited by High Power Impulse Magnetron Sputtering

Author: Warres, Clementine; Meyer, J. C.; Lutz, T.; Albrecht, P.; Engelhart, W.; Schroeppel, B.; Kuemmel, J.
Tübinger Autor(en):
Warres, Clementine
Meyer, Jannik C.
Lutz, Tarek
Albrecht, Philipp
Schröppel, Birgit
Published in: Thin Solid Films (2023), Bd. 781, Article 139977
Verlagsangabe: Lausanne : Elsevier Science Sa
Language: English
Full text: http://dx.doi.org/10.1016/j.tsf.2023.139977
ISSN: 0040-6090
DDC Classifikation: 600 - Technology
530 - Physics
Dokumentart: Article
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