Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

dc.contributor.author	Pachel, Florian
dc.date.accessioned	2022-09-05T07:31:20Z
dc.date.available	2022-09-05T07:31:20Z
dc.date.issued	2021
dc.identifier.issn	1520-8559
dc.identifier.uri	http://hdl.handle.net/10900/131426
dc.language.iso	en	de_DE
dc.publisher	A V S Amer Inst Physics	de_DE
dc.relation.uri	http://dx.doi.org/10.1116/6.0001193	de_DE
dc.subject.ddc	530	de_DE
dc.subject.ddc	600	de_DE
dc.title	Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate	de_DE
dc.type	Article	de_DE
utue.quellen.id	20211125174918_00895
utue.personen.roh	Dill, Pauline
utue.personen.roh	Pachel, Florian
utue.personen.roh	Militzer, Christian
utue.personen.roh	Held, Alexander
utue.personen.roh	Puchas, Georg
utue.personen.roh	Knohl, Stefan
utue.personen.roh	Krenkel, Walter
utue.personen.roh	Tegenkamp, Christoph
utue.personen.roh	Goedel, Werner Andreas
dcterms.isPartOf.ZSTitelID	Journal of Vacuum Science & Technology A	de_DE
dcterms.isPartOf.ZS-Issue	Article 052406	de_DE
dcterms.isPartOf.ZS-Volume	39	de_DE
utue.fakultaet	07 Mathematisch-Naturwissenschaftliche Fakultät	de_DE