Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

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Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

Author: Dill, Pauline; Pachel, Florian; Militzer, Christian; Held, Alexander; Puchas, Georg; Knohl, Stefan; Krenkel, Walter; Tegenkamp, Christoph; Goedel, Werner Andreas
Tübinger Autor(en):
Pachel, Florian
Published in: Journal of Vacuum Science & Technology A (2021), Bd. 39, Article 052406
Verlagsangabe: A V S Amer Inst Physics
Language: English
Full text: http://dx.doi.org/10.1116/6.0001193
ISSN: 1520-8559
DDC Classifikation: 530 - Physics
600 - Technology
Dokumentart: Article
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