Author: | Dill, Pauline; Pachel, Florian; Militzer, Christian; Held, Alexander; Puchas, Georg; Knohl, Stefan; Krenkel, Walter; Tegenkamp, Christoph; Goedel, Werner Andreas | |
Tübinger Autor(en): |
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Published in: | Journal of Vacuum Science & Technology A (2021), Bd. 39, Article 052406 | |
Verlagsangabe: | A V S Amer Inst Physics | |
Language: | English | |
Full text: | http://dx.doi.org/10.1116/6.0001193 | |
ISSN: | 1520-8559 | |
DDC Classifikation: |
530 - Physics 600 - Technology |
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Dokumentart: | Article | |
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