dc.contributor.author |
Al Ktash, Mohammad |
|
dc.contributor.author |
Stefanakis, Mona |
|
dc.contributor.author |
Brecht, Marc |
|
dc.date.accessioned |
2022-06-29T07:44:37Z |
|
dc.date.available |
2022-06-29T07:44:37Z |
|
dc.date.issued |
2021 |
|
dc.identifier.issn |
1424-8220 |
|
dc.identifier.uri |
http://hdl.handle.net/10900/128611 |
|
dc.language.iso |
en |
de_DE |
dc.publisher |
Basel |
de_DE |
dc.relation.uri |
http://dx.doi.org/10.3390/s21217332 |
de_DE |
dc.subject.ddc |
540 |
de_DE |
dc.subject.ddc |
600 |
de_DE |
dc.title |
UV Hyperspectral Imaging as Process Analytical Tool for the Characterization of Oxide Layers and Copper States on Direct Bonded Copper |
de_DE |
dc.type |
Article |
de_DE |
utue.quellen.id |
20220404000000_00650 |
|
utue.personen.roh |
Al Ktash, Mohammad |
|
utue.personen.roh |
Stefanakis, Mona |
|
utue.personen.roh |
Englert, Tim |
|
utue.personen.roh |
Drechsel, Maryam S. L. |
|
utue.personen.roh |
Stiedl, Jan |
|
utue.personen.roh |
Green, Simon |
|
utue.personen.roh |
Jacob, Timo |
|
utue.personen.roh |
Boldrini, Barbara |
|
utue.personen.roh |
Ostertag, Edwin |
|
utue.personen.roh |
Rebner, Karsten |
|
utue.personen.roh |
Brecht, Marc |
|
dcterms.isPartOf.ZSTitelID |
Sensors |
de_DE |
dcterms.isPartOf.ZS-Issue |
21 |
de_DE |
dcterms.isPartOf.ZS-Volume |
21 |
de_DE |
utue.fakultaet |
07 Mathematisch-Naturwissenschaftliche Fakultät |
de_DE |