UV Hyperspectral Imaging as Process Analytical Tool for the Characterization of Oxide Layers and Copper States on Direct Bonded Copper

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UV Hyperspectral Imaging as Process Analytical Tool for the Characterization of Oxide Layers and Copper States on Direct Bonded Copper

Author: Al Ktash, Mohammad; Stefanakis, Mona; Englert, Tim; Drechsel, Maryam S. L.; Stiedl, Jan; Green, Simon; Jacob, Timo; Boldrini, Barbara; Ostertag, Edwin; Rebner, Karsten; Brecht, Marc
Tübinger Autor(en):
Al Ktash, Mohammad
Stefanakis, Mona
Brecht, Marc
Published in: Sensors (2021), Bd. 21, H. 21
Verlagsangabe: Basel
Language: English
Full text: http://dx.doi.org/10.3390/s21217332
ISSN: 1424-8220
DDC Classifikation: 540 - Chemistry and allied sciences
600 - Technology
Dokumentart: Artikel
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