Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers

Author:

Wolter, Silke; Linek, Julian; Altmann, Josepha; Weimann, Thomas; Bechstein, Sylke; Kleiner, Reinhold; Beyer, Jorn; Koelle, Dieter; Kieler, Oliver

Tübinger Autor(en):

Published in:

Micromachines (2021), Bd. 12, Article 350

Verlagsangabe:

Mdpi

Language:

English

Full text:

ISSN:

2072-666X

DDC Classifikation:

530 - Physics
540 - Chemistry and allied sciences
600 - Technology

Dokumentart:

Article

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