Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples

DSpace Repository

Show simple item record

dc.contributor.author Westerhausen, Markus
dc.contributor.author Martin, Tanja
dc.contributor.author Blendinger, Felix
dc.contributor.author Fleischer, Monika
dc.date.accessioned 2020-09-22T11:49:54Z
dc.date.available 2020-09-22T11:49:54Z
dc.date.issued 2020
dc.identifier.issn 1873-5568
dc.identifier.uri http://hdl.handle.net/10900/107039
dc.language.iso en de_DE
dc.publisher Elsevier de_DE
dc.relation.uri http://dx.doi.org/10.1016/j.mee.2020.111315 de_DE
dc.subject.ddc 530 de_DE
dc.subject.ddc 600 de_DE
dc.title Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples de_DE
dc.type Article de_DE
utue.quellen.id 20200715072417_00835
utue.personen.roh Westerhausen, Markus
utue.personen.roh Martin, Tanja
utue.personen.roh Metzger, Michael
utue.personen.roh Blendinger, Felix
utue.personen.roh Fleischer, Monika
utue.personen.roh Hofmann, Boris
utue.personen.roh Bucher, Volker
dcterms.isPartOf.ZSTitelID Microelectronic Engineering de_DE
dcterms.isPartOf.ZS-Issue Article 111315 de_DE
dcterms.isPartOf.ZS-Volume 227 de_DE
utue.fakultaet 04 Medizinische Fakultät de_DE
utue.fakultaet 07 Mathematisch-Naturwissenschaftliche Fakultät de_DE


Files in this item

Files Size Format View

There are no files associated with this item.

This item appears in the following Collection(s)

Show simple item record