Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples

Westerhausen, Markus; Martin, Tanja; Metzger, Michael; Blendinger, Felix; Fleischer, Monika; Hofmann, Boris; Bucher, Volker

dc.contributor.author	Westerhausen, Markus
dc.contributor.author	Martin, Tanja
dc.contributor.author	Blendinger, Felix
dc.contributor.author	Fleischer, Monika
dc.date.accessioned	2020-09-22T11:49:54Z
dc.date.available	2020-09-22T11:49:54Z
dc.date.issued	2020
dc.identifier.issn	1873-5568
dc.identifier.uri	http://hdl.handle.net/10900/107039
dc.language.iso	en	de_DE
dc.publisher	Elsevier	de_DE
dc.relation.uri	http://dx.doi.org/10.1016/j.mee.2020.111315	de_DE
dc.subject.ddc	530	de_DE
dc.subject.ddc	600	de_DE
dc.title	Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples	de_DE
dc.type	Article	de_DE
utue.quellen.id	20200715072417_00835
utue.personen.roh	Westerhausen, Markus
utue.personen.roh	Martin, Tanja
utue.personen.roh	Metzger, Michael
utue.personen.roh	Blendinger, Felix
utue.personen.roh	Fleischer, Monika
utue.personen.roh	Hofmann, Boris
utue.personen.roh	Bucher, Volker
dcterms.isPartOf.ZSTitelID	Microelectronic Engineering	de_DE
dcterms.isPartOf.ZS-Issue	Article 111315	de_DE
dcterms.isPartOf.ZS-Volume	227	de_DE
utue.fakultaet	04 Medizinische Fakultät	de_DE
utue.fakultaet	07 Mathematisch-Naturwissenschaftliche Fakultät	de_DE