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| dc.contributor.author | Rosenstiel, Wolfgang | |
| dc.contributor.author | Bringmann, Oliver | |
| dc.date.accessioned | 2020-08-28T09:45:21Z | |
| dc.date.available | 2020-08-28T09:45:21Z | |
| dc.date.issued | 2020 | |
| dc.identifier.issn | 1941-0158 | |
| dc.identifier.uri | http://hdl.handle.net/10900/105822 | |
| dc.language.iso | en | en |
| dc.publisher | IEEE - Inst Electrical Electronics Engineers Inc | de_DE |
| dc.relation.uri | http://dx.doi.org/10.1109/JMEMS.2020.2978879 | |
| dc.subject.ddc | 600 | de_DE |
| dc.subject.ddc | 530 | de_DE |
| dc.title | Frequency Induced Stiction for MEMS Accelerometers | de_DE |
| dc.type | Article | de_DE |
| utue.quellen.id | 20200715072417_00245 | |
| utue.publikation.seiten | 285-295 | de_DE |
| utue.personen.roh | Baehr, Ulrich | |
| utue.personen.roh | Freier, Marvin | |
| utue.personen.roh | Lewis, Matthew | |
| utue.personen.roh | Linck-Lescanne, Markus | |
| utue.personen.roh | Budak, Christian | |
| utue.personen.roh | Rosenstiel, Wolfgang | |
| utue.personen.roh | Bringmann, Oliver | |
| dcterms.isPartOf.ZSTitelID | Journal of Microelectromechanical Systems | de_DE |
| dcterms.isPartOf.ZS-Issue | 3 | de_DE |
| dcterms.isPartOf.ZS-Volume | 29 | de_DE |
| utue.fakultaet | Universität Tübingen (ohne Fakultätsangabe) |
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