Frequency Induced Stiction for MEMS Accelerometers

dc.contributor.author	Rosenstiel, Wolfgang
dc.contributor.author	Bringmann, Oliver
dc.date.accessioned	2020-08-28T09:45:21Z
dc.date.available	2020-08-28T09:45:21Z
dc.date.issued	2020
dc.identifier.issn	1941-0158
dc.identifier.uri	http://hdl.handle.net/10900/105822
dc.language.iso	en	en
dc.publisher	IEEE - Inst Electrical Electronics Engineers Inc	de_DE
dc.relation.uri	http://dx.doi.org/10.1109/JMEMS.2020.2978879
dc.subject.ddc	600	de_DE
dc.subject.ddc	530	de_DE
dc.title	Frequency Induced Stiction for MEMS Accelerometers	de_DE
dc.type	Article	de_DE
utue.quellen.id	20200715072417_00245
utue.publikation.seiten	285-295	de_DE
utue.personen.roh	Baehr, Ulrich
utue.personen.roh	Freier, Marvin
utue.personen.roh	Lewis, Matthew
utue.personen.roh	Linck-Lescanne, Markus
utue.personen.roh	Budak, Christian
utue.personen.roh	Rosenstiel, Wolfgang
utue.personen.roh	Bringmann, Oliver
dcterms.isPartOf.ZSTitelID	Journal of Microelectromechanical Systems	de_DE
dcterms.isPartOf.ZS-Issue	3	de_DE
dcterms.isPartOf.ZS-Volume	29	de_DE
utue.fakultaet	Universität Tübingen (ohne Fakultätsangabe)