dc.contributor.author |
Rosenstiel, Wolfgang |
|
dc.contributor.author |
Bringmann, Oliver |
|
dc.date.accessioned |
2020-08-28T09:45:21Z |
|
dc.date.available |
2020-08-28T09:45:21Z |
|
dc.date.issued |
2020 |
|
dc.identifier.issn |
1941-0158 |
|
dc.identifier.uri |
http://hdl.handle.net/10900/105822 |
|
dc.language.iso |
en |
en |
dc.publisher |
IEEE - Inst Electrical Electronics Engineers Inc |
de_DE |
dc.relation.uri |
http://dx.doi.org/10.1109/JMEMS.2020.2978879 |
|
dc.subject.ddc |
600 |
de_DE |
dc.subject.ddc |
530 |
de_DE |
dc.title |
Frequency Induced Stiction for MEMS Accelerometers |
de_DE |
dc.type |
Article |
de_DE |
utue.quellen.id |
20200715072417_00245 |
|
utue.publikation.seiten |
285-295 |
de_DE |
utue.personen.roh |
Baehr, Ulrich |
|
utue.personen.roh |
Freier, Marvin |
|
utue.personen.roh |
Lewis, Matthew |
|
utue.personen.roh |
Linck-Lescanne, Markus |
|
utue.personen.roh |
Budak, Christian |
|
utue.personen.roh |
Rosenstiel, Wolfgang |
|
utue.personen.roh |
Bringmann, Oliver |
|
dcterms.isPartOf.ZSTitelID |
Journal of Microelectromechanical Systems |
de_DE |
dcterms.isPartOf.ZS-Issue |
3 |
de_DE |
dcterms.isPartOf.ZS-Volume |
29 |
de_DE |
utue.fakultaet |
Universität Tübingen (ohne Fakultätsangabe) |
|