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| Author: | Baehr, Ulrich; Freier, Marvin; Lewis, Matthew; Linck-Lescanne, Markus; Budak, Christian; Rosenstiel, Wolfgang; Bringmann, Oliver | |
| Tübinger Autor(en): |
|
|
| Published in: |
Journal of Microelectromechanical Systems
(2020), Bd.
29,
H.
3,
S.
285-295 |
|
| Verlagsangabe: | IEEE - Inst Electrical Electronics Engineers Inc | |
| Language: | English | |
| Full text: | http://dx.doi.org/10.1109/JMEMS.2020.2978879 | |
| ISSN: | 1941-0158 | |
| DDC Classifikation: |
600 - Technology 530 - Physics |
|
| Dokumentart: | Article | |
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