Frequency Induced Stiction for MEMS Accelerometers

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Frequency Induced Stiction for MEMS Accelerometers

Author: Baehr, Ulrich; Freier, Marvin; Lewis, Matthew; Linck-Lescanne, Markus; Budak, Christian; Rosenstiel, Wolfgang; Bringmann, Oliver
Tübinger Autor(en):
Rosenstiel, Wolfgang
Bringmann, Oliver
Published in: Journal of Microelectromechanical Systems (2020), Bd. 29, H. 3, S. 285-295
Verlagsangabe: IEEE - Inst Electrical Electronics Engineers Inc
Language: English
Full text: http://dx.doi.org/10.1109/JMEMS.2020.2978879
ISSN: 1941-0158
DDC Classifikation: 600 - Technology
530 - Physics
Dokumentart: Artikel
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