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| Author: | Kshirsagar, Pranoti; Martina, Manuel; Jones, Peter D.; Buckenmaier, Sandra; Kraushaar, Udo; Chasse, Thomas; Fleischer, Monika; Burkhardt, Claus J. | |
| Tübinger Autor(en): |
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| Published in: | Journal of Micromechanics and Microengineering (2018), Bd. 28, Article 075007 | |
| Verlagsangabe: | Iop Publishing Ltd | |
| Language: | English | |
| Full text: | http://dx.doi.org/10.1088/1361-6439/aab9f0 | |
| ISSN: | 1361-6439 | |
| DDC Classifikation: |
530 - Physics 600 - Technology |
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| Dokumentart: | Article | |
| Show full item record |