Local functionalization of CMOS-compatible Si3N4 Mach-Zehnder interferometers with printable functional polymers

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Local functionalization of CMOS-compatible Si3N4 Mach-Zehnder interferometers with printable functional polymers

Author: Melnik, Eva; Muellner, Paul; Mutinati, Giorgio C.; Koppitsch, Guenther; Schrank, Franz; Hainberger, Rainer; Laemmerhofer, Michael
Tübinger Autor(en):
Lämmerhofer, Michael
Published in: Sensors and Actuators B - Chemical (2016), Bd. 236, S. 1061-1068
Verlagsangabe: Elsevier Science Sa
Language: English
Full text: http://dx.doi.org/10.1016/j.snb.2016.05.121
ISSN: 0925-4005
DDC Classifikation: 540 - Chemistry and allied sciences
600 - Technology
Dokumentart: Artikel
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