Author: | Martina, M.; Fleischer, M.; Burkhardt, C. J. | |
Tübinger Autor(en): |
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Published in: |
Microelectronic Engineering
(2017), Bd.
171,
S.
31-36 |
|
Verlagsangabe: | Elsevier Science Bv | |
Language: | English | |
Full text: | http://dx.doi.org/10.1016/j.mee.2017.01.033 | |
ISSN: | 1873-5568 | |
DDC Classifikation: |
530 - Physics 600 - Technology |
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Dokumentart: | Article | |
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