Smart feature selection to enable advanced virtual metrology

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Smart feature selection to enable advanced virtual metrology

Author: Lenz, Benjamin
Tübinger Autor(en):
Lenz, Benjamin
Issue year: 2015
Language: English
Full text: http://nbn-resolving.de/urn:nbn:de:bsz:21-dspace-647034
DDC Classifikation: 004 - Data processing and computer science
Dokumentart: Dissertation
Pages: XII, 156 S., S. XIII - L. : graph. Darst.
Reference: 445252928
445252588
Note: Tübingen, Univ., Diss., 2015.
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