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| Author: | Gollmer, D. A.; Walter, F.; Lorch, C.; Novak, J.; Banerjee, R.; Dieterle, J.; Santoro, G.; Schreiber, F.; Kern, D. P.; Fleischer, M. | |
| Tübinger Autor(en): |
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| Published in: |
Microelectronic Engineering
(2014), Bd.
119,
S.
122-126 |
|
| Verlagsangabe: | Elsevier Science Bv | |
| Language: | English | |
| Full text: | http://dx.doi.org/10.1016/j.mee.2014.03.042 | |
| ISSN: | 0167-9317 | |
| DDC Classifikation: |
530 - Physics 600 - Technology |
|
| Dokumentart: | Article | |
| Show full item record |