Author: | Grützner, Gabi; Fortagne, Olaf; Kern, Dieter P. | |
Tübinger Autor(en): |
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Alternative Title: | Special issue MNE 2011 - Part II | |
Published in: |
Microelectronic engineering
(2012-10), Bd.
98,
S.
(102) |
|
Verlagsangabe: | Amsterdam : Elsevier | |
Language: | English | |
Full text: | http://dx.doi.org/10.1016/j.mee.2012.08.001 | |
ISSN: | 0167-9317 | |
DDC Classifikation: | 530 - Physics | |
Dokumentart: | Article | |
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