Roadmap for focused ion beam technologies

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Roadmap for focused ion beam technologies

Author: Hoeflich, Katja; Hobler, Gerhard; Allen, Frances I.; Wirtz, Tom; Rius, Gemma; McElwee-White, Lisa; Krasheninnikov, Arkady V.; Schmidt, Matthias; Utke, Ivo; Klingner, Nico; Osenberg, Markus; Cordoba, Rosa; Djurabekova, Flyura; Manke, Ingo; Moll, Philip; Manoccio, Mariachiara; De Teresa, Jose Maria; Bischoff, Lothar; Michler, Johann; De Castro, Olivier; Delobbe, Anne; Dunne, Peter; Dobrovolskiy, Oleksandr V.; Frese, Natalie; Goelzhaeuser, Armin; Mazarov, Paul; Koelle, Dieter; Moeller, Wolfhard; Perez-Murano, Francesc; Philipp, Patrick; Vollnhals, Florian; Hlawacek, Gregor
Tübinger Autor(en):
Kölle, Dieter
Published in: Applied Physics Reviews (2023), Bd. 10 (4), Article 041311
Verlagsangabe: Melville : Aip Publishing
Language: English
Full text: http://dx.doi.org/10.1063/5.0162597
ISSN: 1931-9401
DDC Classifikation: 530 - Physics
Dokumentart: Article
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