High-precision contactless optical 3D-metrology of silicon sensors

dc.contributor.author	Lavrik, Evgeny
dc.contributor.author	Mehta, Shaifali
dc.contributor.author	Schmidt, Hans Rudolf
dc.date.accessioned	2020-05-12T07:06:57Z
dc.date.available	2020-05-12T07:06:57Z
dc.date.issued	2019
dc.identifier.issn	1872-9576
dc.identifier.uri	http://hdl.handle.net/10900/100468
dc.language.iso	en	de_DE
dc.publisher	Elsevier Science Bv	de_DE
dc.relation.uri	http://dx.doi.org/10.1016/j.nima.2019.04.039	de_DE
dc.subject.ddc	530	de_DE
dc.subject.ddc	600	de_DE
dc.title	High-precision contactless optical 3D-metrology of silicon sensors	de_DE
dc.type	Article	de_DE
utue.quellen.id	20190926111821_00245
utue.publikation.seiten	167-172	de_DE
utue.personen.roh	Lavrik, E.
utue.personen.roh	Frankenfeld, U.
utue.personen.roh	Mehta, S.
utue.personen.roh	Schmidt, H. R.
dcterms.isPartOf.ZSTitelID	Nuclear Instruments & Methods in Physics Research Section A - Accelerators Spectrometers Detectors and Associated Equipment	de_DE
dcterms.isPartOf.ZS-Volume	935	de_DE
utue.fakultaet	07 Mathematisch-Naturwissenschaftliche Fakultät	de_DE